A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

초록

In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as +/-4.35degrees for x-axis actuation and +/-15.7degrees for y-axis actuation. The actuation voltages are below 4.2V for x-axis actuation and 1.76V for y-axis actuation, respectively.