A shunt-type RF MEMS switch at 3.3V operation actauted by Lorentz force and electrostatic hold

초록

In this paper, we have proposed and fabricated a new shunt-type RF MEMS switch actuated by combination of Lorentz force and electrostatic hold for low power consumption and low voltage operation. There is no static power consumption because it only consumes power when changing state. The proposed switch can be operated with large actuation force and it can enhance power handling capability and mechanical stability. The fabricated switch actuated with an applied current of 49mA and the actuation voltage is 3.3V Also, the power consumption is 87.9 mu J per switching.

키워드