Large Area Replication of AAO Nanostructure Using a Solvent Exchange Method and UV -curable Polymers

초록

An effective insertion in spontaneous mechanism of fluidic polymer precursors into nanometer-scaled holes is realized for the exact replication of nanopatterns in large area. The noble ideas for the spontaneous insertions are based on the explicit principles of physical chemistry; bringing the negative pressure in the holes by ammonia gas to fill the water out and the stepwise exchanges of the fluidic filled materials in spontaneous way. A series of pore type films of anodized aluminum oxide (PTF AAO) is fabricated by the well-defined hole-patterns as the template molds. The spontaneous insertions of fluidic precursors are successfully demonstrated into the nano-holes for polymer patterning in 5 × 5 cm2 area using 4-hydroxybutylacrylate, ethyleneglycol-diacrylate, pyrrole, and the commercially available precursor 311 RM.