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A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency.
- Cho, Il-Joo;
- Yoon, Euisik
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0초록
A new three-axis electromagnetically-actuated micromirror using an SOI wafer is proposed and fabricated. This micromirror can be used for optical switches, optical scanners and alignment modules with low voltage operation and high coupling efficiency due to three degrees of freedom.
- 제목
- A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency.
- 저자
- Cho, Il-Joo; Yoon, Euisik
- 발행일
- 2003-09
- 유형
- Proceedings Paper
- 저널명
- 2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS
- 페이지
- 123 ~ 124
- 언어
- ENG
- 출판사
- IEEE
- 발행국가
- 미국
- 분량
- 2 페이지