WAFER-SCALE FABRICATION OF BIODEGRADABLE SILK-FIBROIN-BASED MEMRISTORS

초록

Development of flexible, biocompatible, biodegradable, and small electronic components is of great interest for implantable medical devices. In this work, we present a highly dense silk-fibroin-based memristor array, fabricated using our newly developed fabrication technique based on UV photolithography. This is the first demonstration of silk-fibroin-based memristors implemented in a cross-bar architecture with a high cell density (single cell of 20 x 20 p,m2 and a density of 105 cm(-2)) which allows individual access to cells. In addition, we implement a fully flexible silk-fibroin-based memristor array fabricated on a Parylene-C film and demonstrate its reliable resistive switching and biodegradability in an enzymatic solution.