Son, Yoojin; Lee, Hyunjoo Jenny; Kim, Dohee; Kim, Yun Kyung; Yoon, Eui-Sung; Kang, Ji Yoon; Choi, Nakwon; Kim, Tae Geun; Cho, Il-Joo
ArticleIssue Date2014CitationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp 853 - 856PublisherIEEE